Deep ultra violet light

From WikiCover

During the Emerging Technologies and Markets TechXPOT in July 2007, Energetiq will introduce its newest light innovation, the Saturn DUV (Deep Ultra Violet) Lamp Subsystem. The Saturn lamp subsystem is an electrodeless high intensity DUV light source that operates in the wavelength range from 400nm down to 170nm to provide energy for photoprocessing and cleaning applications. Short-wavelength light is ideal for thin-film and surface processes because it avoids electrical charge or heating damage to the wafer or substrate.

Energetiq CEO Paul Blackborow: "Using our proprietary inductive coupling technology, the Saturn subsystem achieves a maximum output of DUV light at wavelengths down to 170nm - reducing processing time and significantly lowering cost of ownership."

The Saturn subsystem is packaged in a compact housing for easy integration into process tools. It features an integrated power supply, internal water cooling, and recirculating nitrogen cooling to avoid toxic ozone production. The toroidal bulb inside the lamp is electrodeless, thereby eliminating contamination from electrode debris and prolonging lamp life. The low temperature of the bulb minimizes wafer or substrate heating, allowing greater process flexibility.